Enhancement of the electrical characteristics of MOS capacitors by reducing the organic content of H2O-diluted Spin-On-Glass based oxides-Reference-Cited by-同舟云学术

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Enhancement of the electrical characteristics of MOS capacitors by reducing the organic content of H2O-diluted Spin-On-Glass based oxides

Published:2011-10 Issue:17 Volume:176 Page:1353-1358
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Molina Joel,Muñoz Ana,Torres Alfonso,Landa Mauro,Alarcon Pablo,Escobar Manuel

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference10 articles.

1. Handbook of Semic., Manuf., Techn.;Doering,2008

2. Phosphorous doped SOG as a pre-metal-dielectric for sub-50nm technology nodes

3. Symposium on VLSI Technology Digest of Technical Papers;Ryuzaki,2006

4. Spin-On Glasses,1996

5. Characterization of Spin‐On‐Glass Using Fourier Transform Infrared Spectroscopy

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1. Low-temperature formation of high-quality gate oxide by ultraviolet irradiation on spin-on-glass;Applied Physics Letters;2015-11-02

2. Low-temperature processing of thin films based on rutile TiO2 nanoparticles for UV photocatalysis and bacteria inactivation;Journal of Materials Science;2013-09-28

3. HfO2 nanoparticles embedded within a SOG-based oxide matrix as charge trapping layer for SOHOS-type memory applications;Journal of Non-Crystalline Solids;2012-09

4. MOHOS-type memory performance using HfO2 nanoparticles as charge trapping layer and low temperature annealing;Materials Science and Engineering: B;2012-09

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