Comparison of theoretical evaluations of energetic ion range distributions
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference15 articles.
1. Proc. 9th Int. Conf. on Atomic collisions in solids;Cowern,1982
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Modeling of high energy ion implantation based on splitting of the Boltzmann transport equation;Computational Materials Science;2002-11
2. High energy ion range and deposited energy calculation using the Boltzmann–Fokker–Planck splitting of the Boltzmann transport equation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04
3. On the use of the backward Fokker–Planck equation to calculate range profiles;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-09
4. Computer Simulation of Stopping and Sputtering;Materials Modification by High-fluence Ion Beams;1989
5. Basic physical aspects of high energy implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-12
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