Metal doped fluorocarbon polymer films prepared by plasma polymerization using an RF planar magnetron target
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Published:1983-07
Issue:1-3
Volume:212
Page:497-503
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ISSN:0167-5087
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Container-title:Nuclear Instruments and Methods in Physics Research
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language:en
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Short-container-title:Nuclear Instruments and Methods in Physics Research
Author:
Biederman H.,Holland L.
Subject
General Engineering
Cited by
31 articles.
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