A susceptor heating structure in MOVPE reactor by induction heating-Reference-Cited by-同舟云学术

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A susceptor heating structure in MOVPE reactor by induction heating

Published:2014-06 Issue:1-2 Volume:67 Page:423-428
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Li Zhiming,Li Hailing,Zhang Jincheng,Li Jinping,Jiang Haiying,Fu Xiaoqian,Han Yanbin,Xia Yingjie,Huang Yimei,Yin Jianqin,Zhang Lejuan,Hu Shigang

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

Reference22 articles.

1. Novel packaging design for high-power GaN-on-Si high electron mobility transistors(HEMTs);Cheng;Int. J. Therm. Sci.,2013

2. High-quality GaN nanowires grown on Si and porous silicon by thermal evaporation;Shekari;Appl. Surf. Sci.,2012

3. A numerical study on heat transfer and film growth rate of InP and GaAs MOCVD process;Im;J. Cryst. Growth,2005

4. Computational analysis of wafer temperature non-uniformity in MOVPE system;Shimizu;J. Cryst. Growth,2004

5. Finite element analysis of temperature field in vertical MOCVD reactor by induction heating;Li;J. Semicond.,2009

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and regularity research of MOCVD heating plate based on experiments and simulations;Vacuum;2020-04

2. Simulation and Optimization of Temperature Distribution in Induction Heating Reactor;Journal of Nanoscience and Nanotechnology;2018-11-01

3. Electromagnetic heating and motion mechanism for contact welded pipes based on a node sequential number method;Applied Thermal Engineering;2018-06

4. Study on mobile induction heating process of internal gear rings for wind power generation;Applied Thermal Engineering;2017-02

5. Study on electromagnetic heating process of heavy-duty sprockets with circular coils and profile coils;Applied Thermal Engineering;2016-05

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