1. Thin free standing AlN membranes – mechanically stable and flexible structural material for MEMS devices;Polster;Technical Digest of 19th Micromechanics Europe Workshop,2008
2. Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering;Dubois;Journal of Applied Physics,2001
3. Polymer tactile sensing array with a unit cell of multiple capacitors for three-axis contact force image construction;Lee;Technical Digest IEEE 20th International Conference on MEMS,2007
4. Novel three-axis silicon probe with integrated circuit on chip for microsystem components;Nesterov;Proceedings SPIE,2003
5. Novel piezoelectric polyimide MEMS;Atkinson;Digest of technical papers Transducers’03,2003