Low Polarization Voltage and High Sensitivity CMOS Condenser Microphone Using Stress Relaxation Design-Reference-Cited by-同舟云学术

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Low Polarization Voltage and High Sensitivity CMOS Condenser Microphone Using Stress Relaxation Design

Published:2009-09 Issue:1 Volume:1 Page:859-862
ISSN:1876-6196
Container-title:Procedia Chemistry
language:en
Short-container-title:Procedia Chemistry

Author:

Wu Chia-Yu,Chen Jien-Ming,Kuo Chin-Fu

Publisher

Elsevier BV

Subject

General Medicine

Reference9 articles.

1. Analog Device, Inc., Norwood,MA, www.analog.com

2. A new measurement microphone based on MEMS technology

3. Silicon membrane condenser microphone with integrated field-effect transistor

4. US5490220 : Feb.06,1996, Inventors – Peter V. Loeppert, Hoffman Estates.

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1. ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm;Smart Materials and Structures;2017-04-24

2. A new speech enhancement algorithm for millimeter-wave radar speech sensor;Microwave and Optical Technology Letters;2014-03-11

3. Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-01-21

4. Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology;SPIE Proceedings;2013-03-13

5. A CMOS MEMS Audio Transducer Implemented by Silicon Condenser Microphone With Analog Front-End Circuits of Audio Codec;IEEE Transactions on Very Large Scale Integration (VLSI) Systems;2012-09

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