Precise Control of Metal Oxide Thin Films Deposition in Magnetron Sputtering Plasmas for High Performance Sensing Devices Fabrication-Reference-Cited by-同舟云学术

Precise Control of Metal Oxide Thin Films Deposition in Magnetron Sputtering Plasmas for High Performance Sensing Devices Fabrication

Published:2016 Issue: Volume:20 Page:93-97
ISSN:1876-6196
Container-title:Procedia Chemistry
language:en
Short-container-title:Procedia Chemistry

Author:

Nafarizal Nayan

Publisher

Elsevier BV

Subject

General Medicine

Reference23 articles.

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