Saturated adsorption of PH3 on Si(100):P and its application to digital control of phosphorus coverage on Si(100) surface
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference12 articles.
1. Effect of PH3 on the dissociative chemisorption of SiH4 and Si2H6 on Si(100): Implications on the growth of in situ doped Si thin films
2. Doping reaction of PH3and B2H6with Si(100)
3. Reaction dynamics of molecular hydrogen on silicon surfaces
4. Temperature-programmed-desorption study of the process of atomic deuterium adsorption onto Si(100)2×1
5. An Atomically Resolved STM Study of the Interaction of Phosphine with the Silicon(001) Surface
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2. Recent Advances in Electrochemical Water Splitting and Reduction of CO 2 into Green Fuels on 2D Phosphorene‐Based Catalyst;Energy Technology;2020-12-08
3. Applications of Phosphorene and Black Phosphorus in Energy Conversion and Storage Devices;Advanced Energy Materials;2017-12-01
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