Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures-Reference-Cited by-同舟云学术

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Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Published:2001-03 Issue:1-2 Volume:173 Page:15-21
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Aarik Jaan,Aidla Aleks,Mändar Hugo,Uustare Teet,Kukli Kaupo,Schuisky Mikael

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference19 articles.

1. Hafnia and hafnia-toughened ceramics

2. Materials potentially harder than diamond: Quenchable high-pressure phases of transition metal dioxides

3. Pressure-induced phase transitions and volume changes inHfO2up to 50 GPa

4. Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy

5. Tailoring the dielectric properties of HfO2–Ta2O5 nanolaminates

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