Bubble formation on silicon by helium ion bombardment

Author:

Yamauchi Y.,Hirohata Y.,Hino T.,Nishikawa M.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Effects of Glow-Discharge Parameters on Silicon Coating Thickness Deposited on 316 Stainless Steel Samples;Journal of Fusion Energy;2017-07-22

2. The effect of He and swift heavy ions on nanocrystalline zirconium nitride;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-05

3. Key factors of ion induced nanopatterning;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-05

4. Blue shift of photoluminescence spectrum of porous silicon by helium ion irradiation;Vacuum;2002-08

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