Structural studies of amorphous and crystallized tungsten nitride thin films by EFED, XRD and TEM
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference21 articles.
1. Preparation of Tungsten Nitride Film by CVD Method Using WF 6
2. A New Process for Depositing Tungsten Nitride Thin Films
3. Nitridation of fine grain chemical vapor deposited tungsten film as diffusion barrier for aluminum metallization
4. Metalorganic chemical vapor deposition of tungsten nitride for advanced metallization
5. New method to improve the adhesion strength of tungsten thin film on silicon by W2N glue layer
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