Analysis of local lattice strain around oxygen precipitates in silicon crystals using CBED technique

Author:

Yonemura Mitsuharu,Sueoka Koji,Kamei Kazuhito

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference11 articles.

1. Dynamical diffraction effect on HOLZ-pattern geometry in Si-Ge alloys and determination of local lattice parameter

2. M. Yonemura, S. Sueoka, K. Kamei, Extend Abstracts (The 57th Autumn Meeting, 1996), The Japan Society of Applied Physics No. 1, 162.

3. M. Tanaka, M. Terauchi, T. Kaneyama, Convergent Beam Electron Diffraction II, JEOL, Tokyo, 1993.

4. Morphology and growth process of thermally induced oxide precipitates in Czochralski silicon

5. T. Abe, M. Ogirima, K. Taniguchi, Silicon Crystal and Doping, Maruzen, 1986.

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