Peculiarities of preparing a-SiC:H films from methyltrichlorosilane-Reference-Cited by-同舟云学术

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Peculiarities of preparing a-SiC:H films from methyltrichlorosilane

Published:2001-12 Issue:1-4 Volume:184 Page:128-134
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Rusakov G.V.,Ivashchenko L.A.,Ivashchenko V.I.,Porada O.K.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference15 articles.

1. Physics of Amorphous Silicon–Carbon Alloys

2. A technological evolution from bulk crystalline age to multilayers thin film age in solar photovoltaics

3. Wide band gap a-SiC:H films for optoelectronic applications

4. High power deposition and analytics of amorphous silicon carbide films

5. Influence of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes

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1. An effect of hydrogenation on the photoemission of amorphous SiCN films;International Journal of Hydrogen Energy;2022-02

2. Deposition of SiC/Si coatings in a microwave plasma-assisted spouted bed reactor;Journal of the European Ceramic Society;2018-04

3. An Analysis of Low Frequency Discharge in a CH3SiCl3-Ar-H2 Mixture by Optical Emission Spectroscopy and Actinometry;Plasma Chemistry and Plasma Processing;2010-06-15

4. Mechanical and tribological properties of TiN and SiCN nanocomposite coatings deposited using methyltrichlorosilane;Powder Metallurgy and Metal Ceramics;2008-01

5. Characteristics of monolayer and multilayer titanium nitride plasmochemical coatings;Powder Metallurgy and Metal Ceramics;2006-11

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