Influence of thermal annealing on the ultraviolet stability of a-SiC:H thin films deposited from liquid organosilanes
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Light generation and transportation in luminescent a-SiC:H thin film waveguides
2. Amorphous silicon–carbon based thin films with efficient ultraviolet‐excited photoluminescence and low self‐absorptivity in the emission spectral range
3. Luminescent waveguide structures deposited from liquid organosilane vapour sources
4. Optically induced conductivity changes in discharge‐produced hydrogenated amorphous silicon
5. Light-induced metastable defects in hydrogenated amorphous silicon: A systematic study
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1. Growth and characterization of thin Si-C films in RF plasma and optical emission spectroscopy;physica status solidi (b);2012-10-22
2. Blue/White Emission from Hydrogenated Amorphous Silicon Carbide Films Prepared by PECVD;MRS Proceedings;2009
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4. Effect of Trimethylsilylation on the Film Stress of Mesoporous Silica Ultralow-k Film Stacks;Electrochemical and Solid-State Letters;2006
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