Author:
Kataoka Y,Shigeno M,Tada Y,Wittmaack K
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference11 articles.
1. Y. Kataoka, M. Shigeno, K. Wittmaack, in: M. Foad (Ed.), Ultra Shallow Junctions 2001, Hand-out Proceedings of the Sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, Napa, CA, 2001, p. 128.
2. Quantitative analysis of nitrogen in oxynitrides on silicon by MCs[sup +] secondary ion mass spectrometry?
3. Y. Kataoka, K. Yamazaki, M. Shigeno, Y. Tada, K. Wittmaack, these proceedings.
4. Profile distortions and atomic mixing in SIMS analysis using oxygen primary ions
5. Transient phenomena and impurity relocation in SIMS depth profiling using oxygen bombardment: pursuing the physics to interpret the data
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