Author:
Xu Jun,Moxom Jeremy,Yang Shu,Suzuki R,Ohdaira T
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference12 articles.
1. Semiconductor Res. Corp., in: Proceedings of the International Technology Roadmap for Semiconductors 1999.
2. In Search of Low-
k
Dielectrics
3. S. Yang, P.A. Mirau, C.-S. Pai, O. Nalamasu, E. Reichmanis, E.K. Lin, H.-J. Lee, D.W. Gidley, J. Sun, Chem. Mater. 13 (2001), in press.
4. Positronium annihilation in mesoporous thin films
5. Determination of pore-size distribution in low-dielectric thin films
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