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Deposition of MgO films by pulsed mid-frequency magnetron sputtering

  • Published:2002-11 Issue:1-4 Volume:200 Page:117-124
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Cheng Y.H,Kupfer H,Richter F,Paraian Andreea Maria

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MgO薄膜嵌埋Fe纳米颗粒的紫外窄带增透研究;Laser & Optoelectronics Progress;2023

2. A review of (MgO) thin films, preparation and applications;2ND INTERNATIONAL CONFERENCE OF MATHEMATICS, APPLIED SCIENCES, INFORMATION AND COMMUNICATION TECHNOLOGY;2023

3. Tutorial: Hysteresis during the reactive magnetron sputtering process;Journal of Applied Physics;2018-12-28

4. Au Doping Effect on the Secondary Electron Emission Performance of MgO Films;Materials;2018-10-26

5. Structural properties and surface topography of MgO films prepared on Si (100) by pulsed DC magnetron sputtering;Materials Research Express;2018-08-15
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