Global Feedforward Control of Spatio-Temporal Mechanical Systems: With Application to a Prototype Wafer Stage
Author:
Publisher
Elsevier BV
Subject
Control and Systems Engineering
Reference18 articles.
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1. A Kernel-Based Identification Approach to LPV Feedforward: With Application to Motion Systems;IFAC-PapersOnLine;2023
2. Position-Dependent Snap Feedforward: A Gaussian Process Framework;2022 American Control Conference (ACC);2022-06-08
3. Application of Three-Dimensional Animation in Mechanical Control Mechanism;Journal of Physics: Conference Series;2021-11-01
4. Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage;IEEE Transactions on Control Systems Technology;2021-01
5. Frequency Response Function Identification of LPV Systems: a Global Approach with Application to Mechanical Systems;IFAC-PapersOnLine;2018
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