Non-diagonal <mml:math altimg="si0039.gif" overflow="scroll" xmlns:xocs="http://www.elsevier.com/xml/xocs/dtd" xmlns:xs="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.elsevier.com/xml/ja/dtd" xmlns:ja="http://www.elsevier.com/xml/ja/dtd" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:tb="http://www.elsevier.com/xml/common/table/dtd" xmlns:sb="http://www.elsevier.com/xml/common/struct-bib/dtd" xmlns:ce="http://www.elsevier.com/xml/common/dtd" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:cals="http://www.elsevier.com/xml/common/cals/dtd" xmlns:sa="http://www.elsevier.com/xml/common/struct-aff/dtd"><mml:msub><mml:mrow><mml:mi mathvariant="script">H</mml:mi></mml:mrow><mml:mrow><mml:mi>∞</mml:mi></mml:mrow></mml:msub></mml:math> weighting function design: Exploiting spatio-temporal deformations in precision motion control-Reference-Cited by-同舟云学术

Non-diagonal H∞ weighting function design: Exploiting spatio-temporal deformations in precision motion control

Author:

Boeren Frank,van Herpen Robbert,Oomen Tom^ORCID,van de Wal Marc,Steinbuch Maarten^ORCID

Funder

ASML Research

Philips Innovation Services

Innovational Research Incentives Scheme

Precision Motion: Beyond the Nanometer

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Reference29 articles.

4. Boerlage, M. (2008). Rejection of disturbances in multivariable motion systems (Ph.D. thesis). Eindhoven University of Technology.

5. Position control in lithographic equipment;Butler;IEEE Control Systems Magazine,2011

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