MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors-Reference-Cited by-同舟云学术

MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors

Published:2019 Issue:15 Volume:52 Page:49-54
ISSN:2405-8963
Container-title:IFAC-PapersOnLine
language:en
Short-container-title:IFAC-PapersOnLine

Author:

Yoo Han Woong,Brunner David,Thurner Thomas,Schitter Georg

Publisher

Elsevier BV

Subject

Control and Systems Engineering

Reference11 articles.

1. Data based modelling and identification of nonlinear SDOF MOEMS mirror;Brunner;Proc. SPIE 10931,2019

2. Druml, N., Maksymova, I., Thurner, T., van Lierop, D., Hennecke, M., and Foroutan, A. (2018). 1D MEMS Micro-Scanning LiDAR. In Int. Conf. on Sensor Device Technologies and Appl.

3. Modeling and Characterization of Soft Magnetic Film Actuated 2-D Scanners;Isikman;IEEE J. Sel. Topics Quantum Electron.,2007

4. System Design and Performance Characterization of a MEMS-Based Laser Scanning Time-of-Flight Sensor Based on a 256×64-pixel Single-Photon Imager;Ito;IEEE Photon. J.,2013

5. Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer;Kim;Mi-crosyst. Technol.,2017

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