Robotic precision 3D measurements in vibration-prone environments enabled by active six DoF sample-tracking

Author:

Wertjanz Daniel1,Kern Thomas1,Pechhacker Alexander1,Csencsics Ernst1,Schitter Georg1

Affiliation:

1. Technische Universität Wien,Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN),Vienna,1040

Publisher

IEEE

Reference25 articles.

1. Improving robotic machining accuracy through experimental error investigation and modular compensation;schneider;The International Journal of Advanced Manufacturing Technology,2014

2. Supplemental peak filters for advanced disturbance rejection on a high precision endeffector for robot-based inline metrology;csencsics;IEEE/ASME Transactions on Mechatronics (Early Access),2021

3. Integrated system and control design of a one DoF nano-metrology platform

4. Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments

5. Three-DoF Vibration Compensation Platform for Robot-Based Precision Inline Measurements on Free-Form Surfaces

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Feedforward compensation of scan-induced disturbances for a high-precision robotic 3D measurement system;2023 American Control Conference (ACC);2023-05-31

2. Robot-based measurement system for double-sided inspection of optical components;2023 IEEE International Instrumentation and Measurement Technology Conference (I2MTC);2023-05-22

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