Structuring magnetic thin films by means of plasma etching

Author:

van Delft F.C.M.J.M.

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Glow Discharge Processes;Chapman,1980

2. Dry Etching for VLSI;van Roosmalen,1991

3. Design and fabrication of thin film heads for the digital compact cassette audio system

4. Structural and soft‐magnetic properties of Fe/CoNbZr and Fe/FeCrB multilayers

5. Proceedings IVC-12/ICSS-8;van Delft,1992

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