Optical, electrical and structural properties of amorphous SiCN:H films prepared by rf glow-discharge decomposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference13 articles.
1. Structural, optical and electronic properties of amorphous SiC: H alloys prepared by magnetron sputtering of silicon in methane-argon gas mixtures
2. Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering
3. Improvement of photoconductivity ofa‐SiC:H films by introducing nitrogen during magnetron sputtering process
4. Enhancement of photoconductivity in r.f. glow-discharge-deposited a-SiC: H films doped with nitrogen
5. I. Nakaaki, N. Saito, N. Tanaka, K. Yoshida, J. Vac. Soc. Jpn. 32 (1989) 839 (in Japanese).
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