Author:
Wuu D.S,Horng R.H,Chang C.C,Wu Y.Y
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference13 articles.
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2. The relationship between deposition conditions, the beta to alpha phase transformation, and stress relaxation in tantalum thin films
3. R. Duckworth, Transactions of MRC-Sputtering Conference, Brighton, London, 1969, p. 60.
4. An analysis of thermal stresses in a multilayer thin film printhead
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