Author:
Sassi Z,Chafik K,Bureau J.C,Glachant A,Balland B
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference17 articles.
1. B. Balland, R. Botton, J.C. Bureau, Z. Sassi, J. Prudon, Proceedings of the INFOS, Vol. 39, IOP Publishing Ltd., 1991, pp. 211–216.
2. Physicochemical characterization by means of IR absorption spectroscopy of Si3N4 thin films obtained by chemical vapour deposition assisted by in situ electrical disharge
3. Photo-Chemical Vapor Deposition of Silicon Nitride Film by Direct Photolysis
4. R. Botton, PhD Thesis, INSA de Lyon, Lyon, France, 1991.
5. Nitridation of SiO2 thin films at low ammonia pressures: Composition and electrical properties
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献