Effect of processing parameters on the deposition rate of Si3N4/Si2N2O by chemical vapor infiltration and the in situ thermal decomposition of Na2SiF6-Reference-Cited by-同舟云学术

Effect of processing parameters on the deposition rate of Si3N4/Si2N2O by chemical vapor infiltration and the in situ thermal decomposition of Na2SiF6

Published:2007-06-28 Issue:3 Volume:89 Page:729-735
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Pech-Canul M.I.,de la Peña J.L.,Leal-Cruz A.L.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-007-4153-z.pdf

Reference16 articles.

1. E. Hagen, T. Grande, M.-A. Einarsrud, J. Am. Ceram. Soc. 87, 1200 (2004)

2. X. Pu, X. Liu, F. Qiu, L. Huang, J. Am. Ceram. Soc. 87, 1392 (2004)

3. W.E. Lee, W.M. Rainforth, Ceramic Microstructures, Property Control by Processing (Chapman & Hall, New York, 1994)

4. R.F. Bunshah et al., Deposition Technologies for Films and Coatings (Noyes Publications, Park Ridge, NJ, 1982)

5. N. Ichinose, Introduction to Fine Ceramics Applications in Engineering (John Wiley & Sons Ltd., New York, 1987)

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