SiON large area deposition with a deep-UV flash argon/krypton lamp array-Reference-Cited by-同舟云学术

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SiON large area deposition with a deep-UV flash argon/krypton lamp array

Published:1996-10 Issue: Volume:106 Page:44-50
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Flicstein J.,Mba J.,Lescaut B.,Vitel Y.,Ossart P.,Licoppe C.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference21 articles.

1. Dielectrics in microelectronics — problems and perspectives

2. Chemical Perspectives of Microelectronics Materials;Lucovsky,1994

3. Silicon oxynitride study by the tetrahedron model and by spectroscopic ellipsometry

4. Microelectronic Materials and Processes;Kern,1989

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimization of anti-reflective coatings for lithography applications;SPIE Proceedings;2005-06-16

2. SiON large area deposition with a deep-UV flash argon/krypton lamp array;Applied Surface Science;1996-10

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