Author:
Tsai Tzu-Hsuan,Yen Shi-Chern
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference16 articles.
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4. Development of a Slurry Employing a Unique Silica Abrasive for the CMP of Cu Damascene Structures
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