Surface roughening effect in sub-keV SIMS depth profiling-Reference-Cited by-同舟云学术

Surface roughening effect in sub-keV SIMS depth profiling

Published:2003-01 Issue: Volume:203-204 Page:256-259
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Liu R.,Ng C.M.,Wee A.T.S.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference9 articles.

1. Effects of oxygen flooding on crater bottom composition and roughness in ultrashallow secondary ion mass spectrometry depth profiling

2. Influence of oxygen on the formation of ripples on Si

3. J. Bennett, A. Diebold, in: A. Benninghoven, P. Bertrand, H.-N. Migeon, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry (SIMS),Vol. XII, Elsevier, Amsterdam, 2000, p. 541.

4. Profile distortions and atomic mixing in SIMS analysis using oxygen primary ions

5. C.M. Ng, A.T.S. Wee, C.H.A. Huan, A. See, in: H.B. Harrison, A.T.S. Wee, S. Gupta (Eds.), Advanced Microelectronic Processing Techniques, Proc. SPIE 4227 (2000) 90.

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