B4C/Mo/Si and Ta2O5/Ta nanostructures analysed by ultra-low energy argon ion beams
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference6 articles.
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4. 18O studies of altered layers formed in Si and SiO2 by ion bombardment
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