Influence of nitrogen doping on the properties of 4H–SiC single crystals grown by physical vapor transport
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference11 articles.
1. Nitrogen Incorporation Kinetics during the Sublimation Growth of 6H and 4H SiC
2. Physical Vapor Transport Growth and Properties of SiC Monocrystals of 4H Polytype
3. Observation of 4H–SiC to 3C–SiC polytypic transformation during oxidation
4. 4H- to 3C-SiC Polytypic Transformation during Oxidation
5. Surface Morphology and Chemistry of 4H- and 6H-SiC after Cyclic Oxidation
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1. Quantification of nitrogen in heavily doped silicon carbide by soft X-ray emission spectroscopy;Journal of Crystal Growth;2023-10
2. <i>In Situ</i> Monitoring of Unintentionally Released Nitrogen Gas in the Initial PVT Silicon Carbide Growth Process Using Mass Spectrometry;Materials Science Forum;2022-05-31
3. Effect of cerium impurity on the stable growth of the 4H-SiC polytype by the physical vapour transport method;Journal of Crystal Growth;2022-05
4. Immobilization of partial dislocations bounding double Shockley stacking faults in 4H-SiC observed by in situ synchrotron X-ray topography;Materialia;2021-12
5. Reduction of threading screw dislocations in 4H-SiC crystals by a hybrid method with solution growth and physical vapor transport growth;Journal of Crystal Growth;2021-08
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