Surface morphology and strain of GaN layers grown using 6H-SiC(0001) substrates with different buffer layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference55 articles.
1. GaN grown on hydrogen plasma cleaned 6H‐SiC substrates
2. GaN thin films deposited via organometallic vapor phase epitaxy on α(6H)–SiC(0001) using high‐temperature monocrystalline AlN buffer layers
3. Undoped and doped GaN thin films deposited on high-temperature monocrystalline AlN buffer layers on vicinal and on-axis α(6H)–SiC(0001) substrates via organometallic vapor phase epitaxy
4. Growth and characterization of graded AlGaN conducting buffer layers on n+ SiC substrates
5. Comparative study of GaN layers grown on insulating AlN and conductive AlGaN buffer layers
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