Numerical and experimental study of polysilicon deposition on silicon tubes

Author:

Cai D.,Zheng L.L.,Wan Y.,Hariharan A.V.,Chandra M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference8 articles.

1. J. Maurits, Polycrystalline silicon-world demand and supply, Eighth workshop on Crystalline Silicon Solar Cells Materials and Process, Colorado, August 17–19, 1998, p. 10.

2. Enhanced bulk polysilicon production using silicon tubes;Jafri;J. Crystal Growth,2001

3. US Patent # 3,146,123 and US Patent # 3,200,009.

4. Three dimensional radiative heat-transfer solutions by discrete ordinate method;Fiveland;J. Thermo-Phys. Heat Transfer,1998

5. Growth kinetics of polycrystalline silicon from silane by thermal chemical vapor deposition method;Hashimoto;J. Electrochem. Soc.,1990

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