A nanoindentation study of thick cBN films prepared by chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference18 articles.
1. The synthesis of cubic BN films using a hot cathode plasma discharge in a parallel magnetic field
2. Formation of cBN films by ion beam assisted deposition
3. The synthesis and properties of BN films prepared by ion irradiation and vapor deposition
4. Generation and applications of compressive stress induced by low energy ion beam bombardment
5. Growth of cubic boron nitride coatings in a magnetic field enhanced r.f. glow discharge
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