Author:
Nami Z.,Misman O.,Erbil A.,May G.S.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference21 articles.
1. Organometallic Vapor Phase Epitaxy: Theory and Practice;Stringfellow,1989
2. Numerical Heat Transfer and Fluid Flow;Patankar,1980
3. Statistical equipment modeling for VLSI manufacturing: an application for LPCVD
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