Structural characterization of α-Si films crystallized by combined furnace and laser annealing
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference22 articles.
1. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's
2. High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film
3. Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor
4. Improving the Uniformity of Poly-Si Films Using a New Excimer Laser Annealing Method for Giant-Microelectronics
5. Microstructure of polycrystalline silicon films obtained by combined furnace and laser annealing
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