Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference16 articles.
1. Resistivity of LPCVD Polycrystalline‐Silicon Films
2. The LPCVD Polysilicon Phosphorus Doped In Situ as an Industrial Process
3. S.M. Sze, VLSI Technology, 2nd ed., ch. 6, McGraw-Hill, New York, 1988.
4. Self-aligned transistor with sidewall base electrode
5. S.M. Sze, High-speed Semiconductor Devices, ch. 5, Wiley, New York, 1990.
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