A noncontact scanning electrostatic force microscope for surface profile measurement
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference10 articles.
1. Industrial Uses of STM and AFM;Vorburger;Annals of the CIRP,1997
2. Modelling and Measurement Uncertainty Estimation for Integrated AFM-CMM Instrument;Hansen;Annals of the CIRP,2005
3. Long Range 3D Scanning Tunnelling Microscopy;Weckenmann;Annals of the CIRP,2007
4. Fabrication and Configuration of Carbon Nanotube Probes in Atomic Force Microscopy;Fang;Annals of the CIRP,2009
5. Dynamic Atomic Force Microscopy Methods;García;Surface Science Reports,2002
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