Feedforward compensation of the pose-dependent vibration of a silicon wafer handling robot-Reference-Cited by-同舟云学术

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Feedforward compensation of the pose-dependent vibration of a silicon wafer handling robot

Published:2024 Issue:1 Volume:73 Page:321-324
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Chou Cheng-Hao,Qian Chen^ORCID,Lin Yung-Chun^ORCID,Awtar Shorya^ORCID,Okwudire Chinedum E.^ORCID

Publisher

Elsevier BV

Reference19 articles.

1. A Proposal On Optimized Scheduling Methodology And Its Application To An Actual-Scale Semiconductor Manufacturing Problem;Kaihara;CIRP Annals,2012

2. Chemical And Mechanical Balance In Polishing Of Electronic Materials For Defect-Free Surfaces;Lee;CIRP Annals,2009

3. Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching;Yamamura;CIRP Annals,2007

4. Improving The Overall Equipment Effectiveness In High-Mix-Low-Volume Manufacturing Environments;Jauregui Becker;CIRP Annals,2015

5. Robotics For Electronics Manufacturing;Mathia,2010

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