Etching of micro-channels in fused quartz for novel device applications

Author:

Shetty Shubhava,Kumar Mishra Dileep,Dixit Pradeep,Shetty Shrushti S,Jayarama A.,shah Amit P.,gokhale Mahesh R.,Prabhu Shriganesh,Duttagupta S.P,Pinto Richard

Publisher

Elsevier BV

Subject

Materials Science (miscellaneous)

Reference22 articles.

1. Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: A brief review and outlook;Zhang;Int. J. Mach. Tools Manuf.,2005

2. Gmelins Handbuch der anorganischen Chemie;Schwab;Zeitschrift Fur Phys. Chem.,1957

3. Shubhava, A. Jayarama, G.K. Kannarpady, S. Kale, S. Prabhu, R. Pinto, Chemical etching of glasses in hydrofluoric Acid: A brief review, in: Mater. Today Proc., 2022. https://doi.org/10.1016/j.matpr.2021.12.110.

4. Machining of fluidic channels on borosilicate glass using grinding-aided electrochemical discharge engraving (G-ECDE) and process optimization;Ladeesh;J. Brazilian Soc. Mech. Sci. Eng.,2018

5. Electrical discharge machining-based hybrid machining processes: A review;Shrivastava;Proc. Inst. Mech. Eng. Part B J. Eng. Manuf.,2014

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