1. E.S. Kim, R.S. Muller, P.R. Gray, Integrated microphone with CMOS circuits on a single chip, Technical Digest - International Electron Devices Meeting (1989), pp.880-883.
2. Piezoelectric cantilever microphone and microspeaker;Lee;J. Microelectromech. Syst.,1996
3. T.-L. Ren, L.-T. Zhang, L.-T. Liu, Z.-J. Li, Design of a new ferroelectrics silicon integrated microphone and microspeaker, in: ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076), Vol. 2, 2000, pp. 885-888.
4. Micromachined piezoelectric membrane acoustic device;Choon Ko;Sens. Actuators A,2003
5. R.G. Polcawich, M. Scanlon, J. Pulskamp, J. Clarkson, J. Conrad, D. Washington, R. Piekarz, S. Trolier-Mckinstry, M. Dubey, Design andfabrication of a lead zirconate titanate (PZT) thin _lm acoustic sensor, Integrated Ferroelectrics 54 (November 2014) (2003), pp. 595-606.