Micromorphology of sputtered aluminum thin films: A fractal analysis
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference38 articles.
1. Surface Roughness Measurements Using Power Spectrum Density Analysis with Enhanced Spatial Correlation Length
2. Effect of angle of deposition on micro-roughness parameters and optical properties of HfO2 thin films deposited by reactive electron beam evaporation
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4. Atomic force microscopy analysis of surface topography of pure thin aluminum films
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