Funder
National Science Foundation
Kojundo Chemical Laboratory Co. Ltd.
Quintess Co. Ltd
Subject
Electrical and Electronic Engineering,General Materials Science,Renewable Energy, Sustainability and the Environment
Reference60 articles.
1. Recent progress in materials issues for piezoelectric MEMS;Muralt;J. Am. Ceram. Soc.,2008
2. Thin film piezoelectrics for MEMS;Trolier-McKinstry;J. Electroceram.,2004
3. Elecromechanical Transducers at The Nanoscale: Actution And Sensing of Motion in Nanoelectromechanical Systems (NEMS);Ekinci,2005
4. Self-powered nanosensors and nanosystems;Wang;Adv. Mater.,2012
5. Thin-film piezoelectric MEMS;Eom;MRS Bull.,2012
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