Application of spectrum synthesis method to depth profile analysis-Reference-Cited by-同舟云学术

Application of spectrum synthesis method to depth profile analysis

Published:1990-01 Issue:1 Volume:50 Page:53-60
ISSN:0368-2048
Container-title:Journal of Electron Spectroscopy and Related Phenomena
language:en
Short-container-title:Journal of Electron Spectroscopy and Related Phenomena

Author:

Kojima Isao,Fukumoto Natsuo,Kurahashi Masayasu,Kameyama Tetsuya

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Radiation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Peak resolving of complex Auger spectra by least‐squares fitting with prefiltering of spectra: An application to depth profiling

2. Quantitative analysis of auger electron spectroscopy by curve synthesis method based on non-linear least-squares fitting

3. American Society for Testing and Materials standard guide for electron beam effects in Auger electron spectroscopy (E983-84)

4. Smoothing and Differentiation of Data by Simplified Least Squares Procedures.

5. Calculations of electron inelastic mean free paths for 31 materials

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quantitative Compositional Depth Profiling;Springer Series in Surface Sciences;2012-06-01

2. Sputter depth profile analysis of interfaces;Reports on Progress in Physics;1998-07-01

3. Quantitative Auger analysis of A3B5 pseudobinary compounds by means of spectrum synthesis based on a non-linear least-squares fitting technique;Journal of Electron Spectroscopy and Related Phenomena;1994-05

4. Recent advances in data analysis for electron spectroscopy;Applied Surface Science;1993-06

5. Auger depth profiling of silicon dioxide on silicon: A factor analysis study;Surface and Interface Analysis;1993-01