Probe characterization for scanning probe metrology-Reference-Cited by-同舟云学术

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Probe characterization for scanning probe metrology

Published:1992-07 Issue: Volume:42-44 Page:1616-1620
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Grigg D.A.,Russell P.E.,Griffith J.E.,Vasile M.J.,Fitzgerald E.A.

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Scanning probe tips formed by focused ion beams

2. Scanning probe tip geometry optimized for metrology by focused ion beam ion milling

3. Submicrometer linewidth metrology in the optical microscope

4. Submicrometer microelectronics dimensional metrology: scanning electron microscopy

5. ULSI Science an Technology;Griffith,1991

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