Profiling of the dielectric function across Al/SiO2/Si heterostructures with electron energy loss spectroscopy-Reference-Cited by-同舟云学术

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Profiling of the dielectric function across Al/SiO2/Si heterostructures with electron energy loss spectroscopy

Published:1992-04 Issue:1-3 Volume:41 Page:41-54
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Turowski Marek A.,Kelly Thomas F.

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Solid Surfaces Analysis

2. Scanning transmission electron microscopy: microanalysis for the microelectronic age

3. Proc. SRC Topical Research Conference on High Reliability Gate Dielectrics,1990

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1. Analytical Electron Microscopy;Springer Handbook of Microscopy;2019

2. TEM Applications of EELS;Electron Energy-Loss Spectroscopy in the Electron Microscope;2011

3. Quantitative Analysis of Energy-Loss Data;Electron Energy-Loss Spectroscopy in the Electron Microscope;2011

4. Three-dimensional electron microscopy of individual nanoparticles;Journal of Electron Microscopy;2008-12-24

5. ANALYTICAL TRANSMISSION ELECTRON MICROSCOPY;Annual Review of Materials Research;2005-08-04

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