Direct observation of crystallization in silicon by in situ high-resolution electron microscopy
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. High-resolution transmission electron microscopy of silicon re-growth at controlled elevated temperatures
2. The development ofin situhigh-resolution electron microscopy
3. TEM in-situ investigations of the crystallization behaviour of amorphous silicon thin films
4. Retardation of nucleation rate for grain size enhancement by deep silicon ion implantation of low‐pressure chemical vapor deposited amorphous silicon films
5. Effects of trap-state density reduction by plasma hydrogenation in low-temperature polysilicon TFT
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