An enhanced variable selection and Isolation Forest based methodology for anomaly detection with OES data
Author:
Funder
Maynooth University
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Artificial Intelligence,Control and Systems Engineering
Reference28 articles.
1. Developments of plasma etching technology for fabricating semiconductor devices;Abe;Japan. J. Appl. Phys.,2008
2. The use of the area under the roc curve in the evaluation of machine learning algorithms;Bradley;Pattern Recognit.,1997
3. Random forests;Breiman;Mach. Learn.,2001
4. Plasma etch modeling using optical emission spectroscopy;Chen;J. Vac. Sci. Technol. A,1996
5. Ion-and electron-assisted gas-surface chemistry an important effect in plasma etching;Coburn;J. Appl. Phys.,1979
Cited by 76 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Recent advances in anomaly detection in Internet of Things: Status, challenges, and perspectives;Computer Science Review;2024-11
2. Predictive modelling of residual stress in turning of hard materials using radial basis function network enhanced with principal component analysis;Engineering Science and Technology, an International Journal;2024-07
3. LSTM Short-Term Wind Power Prediction Method Based on Data Preprocessing and Variational Modal Decomposition for Soft Sensors;Sensors;2024-04-15
4. About the Data Analysis of Optical Emission Spectra of Reactive Ion Etching Processes—The Method of Spectral Redundancy Reduction;Plasma;2024-03-20
5. Double bagging trees with weighted sampling for predictive maintenance and management of etching equipment;Journal of Process Control;2024-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3