Ionic Contamination and Analytical Techniques for Ionic Contaminants-Reference-Cited by-同舟云学术

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Ionic Contamination and Analytical Techniques for Ionic Contaminants

Published:2008 Issue: Volume: Page:653-673
ISSN:
Container-title:Developments in Surface Contamination and Cleaning
language:
Short-container-title:

Author:

Newton Beverly

Publisher

Elsevier

Reference20 articles.

1. Corrosion of Electronics. The Role of Ionic Substances;Sinclair;J. Electrochem. Soc.,1988

2. Forecast of Airborne Molecular Contamination Limits for the 0.25 Micron High Performance Logic Process;Kinkead;SEMATECH Technical Report, Technology Transfer # 95052812A-TR,1995

3. Using CDSEM To Evaluate Material Compatibility with DUV Photoresists;Lin;Micro,1999

4. Airborne Chemical Contamination of a Chemically Amplified Resist;MacDonald,1991

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Metallic Contaminants on Surfaces and Their Impact;Developments in Surface Contamination and Cleaning: Types of Contamination and Contamination Resources;2017

2. Methods for Monitoring and Measuring Cleanliness of Surfaces;Developments in Surface Contamination and Cleaning;2012

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