Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Low power density sputtering on semiconductors;Davidse,1969
2. Radio frequency sputtering;Lloyd,1969
3. Characterisation, control and use of dielectric charge effects in silicon technology;Szedon;J. Vac. Sci. Technol.,1969
4. Metal edge coverage and control of charge accumulation in r.f. sputtered insulators;Logan;IBM J. Res. Develop.,1970
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